Articolo in rivista, 2013, ENG, 10.1016/j.mee.2012.12.023

Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon

Shahmoon, Asaf; Limon, Ofer; Businaro, Luca; Ciasca, Gabriele; Azugi, Yhonathan; Gerardino, Annamaria; Zalevsky, Zeev

SAOT; University of Erlangen Nuremberg; Bar Ilan University; Consiglio Nazionale delle Ricerche (CNR)

In this paper we present a design as well as the fabrication procedure of a new type of electro-optical modulator based on plasma dispersion effect. The device consists from a regular single mode silicon waveguide and periodically patterned electrodes made out an indium thin oxide (ITO) located along both sides of the optical core through which the photonic signal is propagating. By applying voltage on the electrodes a periodic change in the free electrons is occurred along the optical core. This change affects both the imaginary and real part of the refractive index resulting in the generation of periodic change in the refractive index that creates an effective Bragg reflector. Different fabrication strategies are reported. (C) 2013 Elsevier B.V. All rights reserved.

Microelectronic engineering 105 , pp. 107–112

Keywords

Silicon, Waveguide, Modulators, Bragg reflector, Integrated optics

CNR authors

Gerardino Annamaria, Businaro Luca

CNR institutes

IFN – Istituto di fotonica e nanotecnologie