Articolo in rivista, 2013, ENG, 10.1088/0963-0252/22/4/045017

Kinetic modelling of atom production and thermalization in CCRF discharges in H2

Panarese A.; Diomede P.; Longo S.

Department of Chemistry, University of Bari, via Orabona 4, BARI 70126, Italy; Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, TX 77204-4004, United States; CNR-IMIP, Bari Section, via Amendola 122/D, BARI 70126, Italy; INAF-Osservatorio Astrofisico di Arcetri, Largo E. Fermi 5, I-50125 Firenze, Italy

[object Object]

Plasma sources science & technology (Online) 22 (4)

Keywords

Idrogeno, RF, materiali, modelli

CNR authors

Longo Savino, Panarese Antonio

CNR institutes

ID: 302929

Year: 2013

Type: Articolo in rivista

Creation: 2015-02-10 13:11:40.000

Last update: 2021-04-09 20:14:05.000

External IDs

CNR OAI-PMH: oai:it.cnr:prodotti:302929

DOI: 10.1088/0963-0252/22/4/045017

Scopus: 2-s2.0-84880645663