CNR ExploRA

Monografia o trattato scientifico, 2016, ENG, 10.1007/978-1-4419-8185-1

Fundamental Aspects of Plasma Chemical Physics Kinetics

Mario Capitelli, Roberto Celiberto, Gianpiero Colonna, Fabrizio Esposito, Claudine Gorse, Khaled Hassouni, Annarita Laricchiuta, Savino Longo

Mario Capitelli - Department of Chemistry, University of Bari & CNR Bari (Italy) Roberto Celiberto - DICATECh Polytechnic of Bari & CNR Bari (Italy) Gianpiero Colonna - CNR Bari (Italy) Fabrizio Esposito - CNR Bari (Italy) Claudine Gorse - Department of Chemistry, University of Bari & CNR Bari (Italy) Khaled Hassouni - Laboratoire des Sciences des Procédés et des Matériaux, CNRS-INSIS Paris (France) Annarita Laricchiuta - CNR Bari (Italy) Savino Longo - Department of Chemistry, University of Bari & CNR Bari (Italy)

Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries. The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.