Articolo in rivista, 2016, ENG, 10.1088/0957-4484/27/7/075606

Synthesis and characterization of P delta-layer in SiO2 by monolayer doping

Arduca, Elisa; Mastromatteo, Massimo; De Salvador, Davide; Seguini, Gabriele; Lenardi, Cristina; Napolitani, Enrico; Perego, Michele

IMM CNR; [object Object]; MATIS IMM CNR; [object Object]

Achieving the required control of dopant distribution and selectivity for nanostructured semiconducting building block is a key issue for a large variety of applications. A promising strategy is monolayer doping (MLD), which consists in the creation of a well-ordered monolayer of dopant-containing molecules bonded to the surface of the substrate. In this work, we synthesize a P delta-layer embedded in a SiO2 matrix by MLD. Using a multi-technique approach based on time of flight secondary ion mass spectrometry (ToF-SIMS) and Rutherford backscattering spectrometry (RBS) analyses, we characterize the tuning of P dose as a function of the processing time and temperature. We found the proper conditions for a full grafting of the molecules, reaching a maximal dose of 8.3 x 10(14) atoms/cm(2). Moreover, using 1D rate equation model, we model P diffusion in SiO2 after annealing and we extract a P diffusivity in SiO2 of 1.5 x 10(17) cm(2) s(-1).

Nanotechnology (Bristol. Print) 27 (7)

Keywords

monolayer doping, silicon dioxide, delta layer, phosphorus, diffusivity

CNR authors

De Salvador Davide, Arduca Elisa, Napolitani Enrico, Perego Michele, Seguini Gabriele

CNR institutes