Articolo in rivista, 2021, ENG, 10.1016/j.optmat.2021.111023

Design, fabrication and assessment of an optomechanical sensor for pressure and vibration detection using flexible glass multilayers

Osman Sayginer, Erica Iacob, Stefano Varas, Anna Szczurek, Maurizio Ferrari, Anna Lukowiak, Giancarlo C.Righini, Oreste S.Bursi, Alessandro Chiasera

Osman Sayginer, a,b, Erica Iacob, c Stefano Varas, b Anna Szczurek b d Maurizio Ferrari, b Anna Lukowiak, e Giancarlo C.Righini, f Oreste S.Bursi, a,b, Alessandro Chiasera, b a Department of Civil, Environmental and Mechanical Engineering, University of Trento, 38123, Trento, Italy b IFN-CNR CSMFO Lab, FBK Photonics Unit, Via Alla Cascata 56/C, 38100, Trento, Italy c MNF, Micro Nano Facility, Centre for Materials and Microsystems, Bruno Kessler Foundation, Via Sommarive 18, 38123, Trento, Italy d Department of Mechanics, Materials Science and Engineering, Wroclaw University of Science and Technology, Smoluchowskiego 25, 50-370, Wroclaw, Poland e Institute of Low Temperature and Structure Research, PAS, Okolna 2, 50-422, Wroclaw, Poland f IFAC-CNR, MIPLAB Laboratory, Via Madonna Del Piano 10, 50019, Sesto Fiorentino, Italy

We introduce an easily implementable optomechanical device for pressure and vibration sensing using a multilayer structure on a flexible substrate. We present the design, fabrication and evaluation steps for a proof-of-concept device as well as optical glass components. The design steps include optical, mechanical, and optomechanical correlation simulations using the transfer matrix method, finite element analysis, geometric optics and analytical calculations. The fabrication part focuses on the deposition of multilayers on polymeric flexible substrates using the radio frequency sputtering technique. To investigate the quality of the glass coatings on polymeric substrates, atomic force microscopy and optical microscopy are also performed. Optical measurements reveal that, even after bending, there are no differences between multilayer samples deposited on the polymeric and SiO2 substrates. The performance assessment of the proof-of-concept device shows that the sensor resonance frequency is around 515 Hz and the sensor static response is capable of sensing from 50 Pa to 235 Pa.

Optical materials (Amst., Print) 115 , pp. 1–10

Keywords

Sensor design, Flexible photonics, Optomechanical sensor, Modeling, Vibration sensor, Pressure sensor, RF-Sputtering, 1D photonic crystal, Glass photonics

CNR authors

Righini Giancarlo, Sayginer Osman, Ferrari Maurizio, Chiasera Alessandro, Varas Stefano

CNR institutes

IFAC – Istituto di fisica applicata "Nello Carrara", IFN – Istituto di fotonica e nanotecnologie