Abstract in atti di convegno, 2022, ENG

RF - Sputtering Fabrication of Flexible SiO2/hfO2 Glass-based 1D Photonic Crystals and Planar Waveguides

A. Carlotto, S.M. Pietralunga, L.T.N. Tran, O. Sayginer, E. Iacob, A. Szczurek, S. Varas, J. Krzak, O.S. Bursi, D. Zonta, A. Lukowiak, G.C. Righini, M. Ferrari, A. Chiasera

IFN-CNR CSMFO Lab. and FBK Photonics Unit, Povo, Trento, Italy; IFN-CNR, Milano, Italy; Dept. of Materials Technology, Fac. of Applied Sciences, Ho Chi Minh City University of Technology and Education, Thu Duc District, Ho Chi Minh City, Vietnam; The Technical University of Munich, TranslaTUM, München, Germany; Fondazione Bruno Kessler, Centre for Materials and Microsystems, Micro Nano Facility, Povo, Trento, Italy; Dept. of Mechanics, Materials and Biomedical Eng., Wroclaw University of Science and Technology, Wroclaw, Poland; Dept. of Civil, Environmental and Mechanical Eng., University of Trento, Mesiano, Trento, Italy; Institute of Low Temperature and Structure Research, PAS, Wroclaw, Poland; MiPLab, IFAC-CNR, Sesto Fiorentino, Italy

While conventional photonic devices are fabricated on rigid substrates, integration of glass systems on deformable substrates has given birth to flexible photonics, a research field which has rapidly emerged in recent years. However, a careful design of the structures, selecting of the materials and the development of a suitable fabrication protocol are required. RF-sputtering deposition protocols are here developed for the fabrication of SiO2/HfO2 glass-based 1D photonic crystals and planar waveguides on flexible polymeric and glass substrates. 1D multilayer structures, made up on SiO2 and HfO2 films, were first modelled by Transfer Matrix Methods and then fabricated by RF-sputtering technique on different substrates. The optical features of the samples were investigated to highlight as the different nature of the substrates and the mechanical deformations of the samples do not influence the transmittance of the samples.

15th International Ceramic Congress CIMTEC 2022, Perugia, Italy, 20/06/2022-24/06/2022

Keywords

flexible photonics, rf-sputtering deposition, photonic bandgap, photonics integrated circuits, multilayers, resonant cavities

CNR authors

Ferrari Maurizio, Righini Giancarlo, Tran Lam Thi Ngoc, Chiasera Alessandro, Pietralunga Silvia Maria

CNR institutes

IFAC – Istituto di fisica applicata "Nello Carrara", IFN – Istituto di fotonica e nanotecnologie