Articolo in rivista, 2003,

Chromium oxide wear and corrosion protection coatings deposited via MOCVD

carta G. 1, Bonafini M. 2, Kaciulis S. 3, Mezzi A. 3, Natali M. 1, Restello S. 2, Rigato V. 2, Rossetto G. 1, Salmaso G. 2, Zanella P. 1

1. ICIS - CNR - Padova 2. INFN - Laboratori di Legnaro

... Here we investigate Cr2O3 chromia film deposition via metalorganic chemical vapour deposition (MOCVD) on Fe-Cr-Ni AISI304 stainless steel (Cr18.2, Ni 9.07, Mn 1.73, Si 0.6, C 0.0022 wt%). For characterization purposes films were deposited also on (001) silicon wafers. Chromia film growth was compared for three different precursors: (1) Cr(CO)6, (2) Cr(III)hexafluoro-acetyl-acetonate and (3) tris (2,2,6,6-tetramethyl-3,5-heptane-ditionatohromium (III). The morphological, structural and chemical properties of the films were compared. The most useful precursor was found to be Cr(CO)6 and the films obtained with this precursor were further investigated by scratch testing and nonoindentation to determine the film adhesion and coating hardness.

Keywords

MOCVD, deposition, Cr2O3

CNR authors

Zanella Pierino, Carta Giovanni, Natali Marco Stefano, Rossetto Gilberto Lucio

CNR institutes

ICIS – Istituto di chimica inorganica e delle superfici, ICMATE – Istituto di Chimica della Materia Condensata e di Tecnologie per l'Energia

ID: 61665

Year: 2003

Type: Articolo in rivista

Creation: 2009-06-16 00:00:00.000

Last update: 2019-11-25 16:17:56.000

External links

OAI-PMH: Dublin Core

OAI-PMH: Mods

OAI-PMH: RDF

External IDs

CNR OAI-PMH: oai:it.cnr:prodotti:61665