RESULTS FROM 1 TO 1 OF 1

2020, Articolo in rivista, ENG

Active dopant profiling and Ohmic contacts behavior in degenerate n-type implanted silicon carbide

Spera, Monia; Greco, Giuseppe; Severino, Andrea; Vivona, Marilena; Fiorenza, Patrick; Giannazzo, Filippo; Roccaforte, Fabrizio

This Letter reports on the active dopant profiling and Ohmic contact behavior in degenerate P-implanted silicon carbide (4H-SiC) layers. Hall measurements showed a nearly temperature-independent electron density, corresponding to an electrical activation of about 80% of the total implanted dose. Using the Hall result as calibration, the depth resolved active P-profile was extracted by scanning capacitance microscopy (SCM). Such information on the active P-profile permitted to elucidate the current injection mechanism at the interface of annealed Ni Ohmic contacts with the degenerate n-type 4H-SiC layer. Modeling the temperature dependence of the specific contact resistance with the thermionic field emission mechanism allowed extracting a doping concentration of 8.5x10(19)cm(-3) below the metal/4H-SiC interface, in excellent agreement with the value independently obtained by the SCM depth profiling. The demonstrated active dopant profiling methodology can have important implications in the 4H-SiC device technology.

Applied physics letters 117 (1), pp. 013502-1–013502-4

DOI: 10.1063/5.0012029

InstituteSelected 0/0
No values ​​available
AuthorSelected 0/4
    Fiorenza Patrick (1)
    Greco Giuseppe (1)
    Roccaforte Fabrizio (1)
    Vivona Marilena (1)
TypeSelected 0/1
    Articolo in rivista (1)
Research programSelected 0/1
    DFM.AD001.100.001, Dispositivi di potenza, Rf e componenti passivi per elettronica integrata ad alte prestazioni (1)
EU Funding ProgramSelected 0/0
No values ​​available
EU ProjectSelected 0/0
No values ​​available
YearSelected 0/1
    2020 (1)
LanguageSelected 0/1
    Inglese (1)
Keyword

ohmi contacts

RESULTS FROM 1 TO 1 OF 1