Poster, 2004,

n+/p Diodes Realized in SiC by Phosphorus Ion Implantation: Electrical Characterization as a Function of Temperature

Canino M., Castaldini A.,Cavallini A., Moscatelli F., Nipoti R., Poggi A.

CNR-IMM University of Bologna

ECSCRM 2004, Bologna

Keywords

SiC, ion implantation, n+/p diode, electrical characterization, defects

CNR authors

Moscatelli Francesco, Canino Maria Concetta, Poggi Antonella, Nipoti Roberta

CNR institutes

IMM – Istituto per la microelettronica e microsistemi