Poster, 2004,

Ni-silicide Contacts to 6H-SiC: Contact Resistivity and Barrier Height on Ion Implanted n-type and Barrier Height on p-type Epilayer

Moscatelli F., Scorzoni A., Poggi A., Canino M., Nipoti R.

CNR-IMM DIEI and INFN University of Florence

ECSCRM 2004, Bologna

Keywords

SiC, barrier hight, Ni contacts, contact resistivity

CNR authors

Scorzoni Andrea, Moscatelli Francesco, Canino Maria Concetta, Poggi Antonella, Nipoti Roberta

CNR institutes

IMM – Istituto per la microelettronica e microsistemi