Articolo in rivista, 2012, ENG, 10.1088/0022-3727/45/35/355301

Fiber texturing in nano-crystalline TiO2 thin films deposited at 150 degrees C by dc-reactive sputtering on fiber-textured [0001] ZnO:Al substrates

Pellegrino G, Bongiorno C, Ravesi S, Alberti A

[ 1 ] CNR IMM Zona Ind, I-95121 Catania, Italy [ 2 ] STMicroelectronics, I-95121 Catania, Italy

TiO2 thin films were deposited at an effective surface temperature of 150 degrees C by dc-reactive magnetron sputtering on ZnO : Al oriented substrates having a fiber texture along the [0 0 0 1] axis, and studied by transmission electron microscopy and x-ray diffraction analyses. The substrate texturing was used to tailor the TiO2 structure in such a way that a porous matrix made of anatase nano-grains (10 nm in diameter) is formed instead of an amorphous layer (as observed at 150 degrees C on glass). Additionally, we demonstrate that, by adding an ex situ 200 degrees C annealing, the anatase domains also gain a fiber texture with the axes aligned to that of the substrate. The TiO2/AZO structural coupling is expected to play a crucial role for the carrier transport through the interface as required in dye-sensitized solar cells. Moreover, the low temperatures used render the process compatible with commonly used plastics substrates.

Journal of physics. D, Applied physics (Print) 45 (35)

Keywords

SOLAR-CELLS, OXIDE-FILMS, ANATASE, RUTILE, TEMPERATURE

CNR authors

Pellegrino Giovanna, Alberti Alessandra, Bongiorno Corrado

CNR institutes

IMM – Istituto per la microelettronica e microsistemi