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2017, Contributo in atti di convegno, ENG

Near-field microwave techniques for micro- and nano-scale characterization in materials science

Marcelli, R.; Lucibello, A.; Capoccia, G.; Proietti, E.; Sardi, G. M.; Joseph, C. H.; Michalas, L.; Bartolucci, G.; Kienberger, F.; Gramse, G.

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability

2017 International Semiconductor Conference (CAS), 11-14/10/2017

DOI: 10.1109/SMICND.2017.8101147

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    Marcelli Romolo (1)
    Proietti Emanuela (1)
    Sardi Giovanni Maria (1)
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    Contributo in atti di convegno (1)
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    FP7 (1)
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    NANOMICROWAVE (1)
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    2017 (1)
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Keyword

Dielectric measurement

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