Contributo in atti di convegno, 2017, ENG, 10.1109/SMICND.2017.8101147

Near-field microwave techniques for micro- and nano-scale characterization in materials science

Marcelli, R.; Lucibello, A.; Capoccia, G.; Proietti, E.; Sardi, G. M.; Joseph, C. H.; Michalas, L.; Bartolucci, G.; Kienberger, F.; Gramse, G.

CNR-IMM, Rome, ITALY University of Roma "Tor Vergata", Rome, ITALY Keysight Technologies Austria GmbH, Linz, Austria Johannes Kepler University, Biophysics Institute, Linz, Austria

In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability

2017 International Semiconductor Conference (CAS), pp. 29–36, 11-14/10/2017

Keywords

Microwave measurement, Silicon, Microwave imaging, Dielectric measurement, Microwave circuits, Transmission line measurements

CNR authors

Bartolucci Giancarlo, Christopher Hardley Joseph, Sardi Giovanni Maria, Michalas Loukas, Proietti Emanuela, Lucibello Andrea, Capoccia Giovanni, Marcelli Romolo

CNR institutes

IMM – Istituto per la microelettronica e microsistemi