Presentazione, 2005,

BORON DISTRIBUTION IN SILICON AFTER EXCIMER LASER ANNEALING WITH MULTIPLE PULSES

E.V. Monakhov and B.G. Svensson, M.K. Linnarsson, A. La Magna, M. Italia and V. Privitera, G. Fortunato and L. Mariucci

European Materials Research Society, Strasbourg

Keywords

CNR authors

Privitera Vittorio, Mariucci Luigi, Fortunato Guglielmo, La Magna Antonino, Italia Markus

CNR institutes

IMM – Istituto per la microelettronica e microsistemi

ID: 115599

Year: 2005

Type: Presentazione

Creation: 2009-06-16 00:00:00.000

Last update: 2009-06-16 00:00:00.000

External links

OAI-PMH: Dublin Core

OAI-PMH: Mods

OAI-PMH: RDF

External IDs

CNR OAI-PMH: oai:it.cnr:prodotti:115599