Contributo in atti di convegno, 2018, ENG, 10.1109/DTIP.2018.8394183

Near field microwave microscopy for MEMS and micro-electronic device characterization

Capoccia, G.; Sardi, G. M.; Marcelli, R.; Proietti, E.

CNR-IMM, Roma, Italy

In this work, an electromagnetic technique for imaging and spectroscopy of materials and devices, suitable for the characterization of MEMS and microelectronics configurations as a function of frequency in the microwave range, will be presented. In particular, near field measurements will be shown for the evaluation of dielectric properties of the materials and for imaging of RF devices. Perspective utilization in the evaluation of quantities having specific interest for the microelectronics and MEMS industries will be discussed, with reference to properties that can be deduced from the measured surface impedance, like the morphology and the frequency dependence of the material properties.

2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Roma, 22-25/05/2018

Keywords

near field, microwaves, EM mapping, MEMS imaging, failure analysis

CNR authors

Sardi Giovanni Maria, Proietti Emanuela, Capoccia Giovanni, Marcelli Romolo

CNR institutes

IMM – Istituto per la microelettronica e microsistemi